Side Coil Assembly
Uniform Heating for Deposition Systems
The Side Coil heating assembly is a heating component specifically designed for the side walls of chambers. It is primarily used for supplementary heating and achieving uniform temperature distribution across the entire chamber in various vacuum chambers and process equipment, effectively addressing issues such as cold spots and temperature inconsistencies within the chamber.The Side Coil utilizes a proven, integrated armor-clad molding process. Through precision winding, structural shaping, heat treatment, and enhanced insulation, the product achieves excellent structural strength and thermal stability. Featuring a side-wall wrap-around design, it does not come into direct contact with the process medium or core workpieces, instead achieving uniform temperature compensation throughout the chamber via heat conduction through the outer wall.
- Compatible Chambers: Mainstream deposition equipment
- Primary Process: High-Density Plasma Chemical Vapor Deposition (HDP-CVD)
- Component Function: Lateral RF inductive coupling and plasma excitation
- Main Material: High-purity oxygen-free copper
- Surface Treatment: Standard silver plating or special insulating anti-corrosion coating to reduce the skin effect
- Interface Design: Standardized RF input interface and cooling fluid connector
Product Description
The product supports multi-zone independent power distribution based on the chamber structure. Combined with a dedicated cold-end protection structure, it effectively safeguards precision components such as flanges and seals, preventing high-temperature aging. In deposition processes, plasma density and distribution affect film gap filling and deposition uniformity. This sidewall coil is mounted on the chamber sidewall and works in conjunction with other excitation components to provide RF coupling for the process.The coil’s materials and structure are specifically designed to withstand the process environment, balancing corrosion resistance with long-term operational requirements; parameter matching ensures that RF coupling remains stable. The product also features insulation and protective structures to facilitate electrical isolation and reliable installation, and supports configurable cooling solutions to control temperature rise during operation and enhance operational stability.
Applications
Vacuum process chamber equipment: Used to supplement heat to the chamber sidewalls, balance the chamber temperature field, and reduce process instability caused by wall temperature differences.
- Panel and Optoelectronic Vacuum Process Equipment: Thin-film deposition, surface treatment, and chamber cleaning, among others.
- Industrial and Research Plasma Systems: Material surface modification, cleaning and activation, functional coatings, and process validation platforms.
- Various Industrial Process Equipment: Process chambers requiring continuous baking and degassing, temperature stabilization, and anti-condensation measures.
Advantages
- Temperature Field Balancing: The sidewall-wrapping heating structure effectively compensates for heat loss through the chamber sidewalls, improves localized low-temperature areas, and ensures a more uniform temperature distribution within the chamber.
- Cold-End Protection Design: Low temperatures in the joint area are controllable, protecting the sealing structure and flange components, reducing the risk of equipment aging, and enhancing overall equipment stability.
- Suitable for Complex Operating Conditions: The armored insulation structure offers high pressure resistance, heat resistance, and stability, making it suitable for vacuum and high-temperature continuous operation.
- Highly Customizable: External dimensions, winding methods, power configurations, and mounting structures can all be adjusted as needed to accommodate different equipment chamber designs.
- Stable Process Adaptation: Compatible with equipment baking and degassing processes, helping the chamber quickly reach a stable process state and maintaining continuous operational efficiency.
- Corrosion Protection and Cleanliness Assurance: Designed for cleanroom and internal equipment operating conditions, the coil surface features a specialized anti-corrosion and anti-oxidation coating that resists discoloration and flaking over long-term use, preventing particulate contamination of the clean environment.
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