PFA Chemical Heater
Corrosion-Resistant,Contamination-Free
The Cylindrical Horizontal Chemical Heater / Liquid Heater, 6 KW model, available in multiple specifications, equipped with a corrosion-resistant sealed junction box, suitable for mass production integration with domestic etching equipment. Suitable for highly corrosive cleanroom applications such as semiconductor etching and cleaning, photovoltaic wafer texturing, and maintaining a constant temperature for high-purity electronic chemicals; parts in contact with the chemical solution are made of high-purity PFA fluoroplastic, and the heating element is fully encased in a high-purity PFA protective layer. With no metal components on the side in contact with the chemical solution, this design effectively reduces the risk of fluid contamination caused by metal ion leaching.
- Wetted Materials: High-purity PFA
- Heating Power: Standard 1–12 KW
- Temperature Control Range: Ambient temperature to 120°C
- Working Media: HF, acids, alkalis, high-purity cleaning solutions
- Power Supply: 220 V/380 V
- Protection Features: Dry-run protection, over-temperature protection, and liquid leak power-off protection
- Configurations: In-line piped / Tank immersion
Product Description
This PFA chemical heater is suitable for highly corrosive cleanroom environments, such as semiconductor wet processes and the heating of chemicals for photovoltaic silicon wafers. The wetted parts are made of high-purity PFA, and the heating element is fully encapsulated and isolated by PFA, ensuring that metal components do not come into direct contact with the chemicals. It features integrated PID temperature control and multiple safety protections to minimize the risk of ion leaching, making it ideal for cleanroom manufacturing processes.
Applications
- Semiconductor Industry: Heating of solutions for wafer cleaning, etching, and stripping
- Photovoltaic and New Energy Industry: Heating of acid and alkali solutions for silicon wafer texturing and cleaning
- Electronics (PCB/FPC) Industry: Constant-temperature control of etching, micro-etching, and film-stripping solutions
- Multi-sector Cleanroom Processes: Heating of high-purity etching solutions for optical glass, lithium-ion batteries, and clean laboratories
Advantages
- High-Purity Wetted-Part Design: Fully PFA wetted parts ensure no metal leaching, resulting in high-purity, contamination-free solutions
- High Corrosion Resistance: Resists strong acids and alkalis; compatible with various etching chemicals
- Consistent Temperature Control: Stable and uniform temperature regulation prevents solution degradation due to high temperatures
- Operational Safety Assurance: Multiple safety protections eliminate risks of dry heating and overheating
- Flexible Model Selection: Available in immersion and inline configurations to suit a wide range of production lines
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